INSPECTION APPARATUS, EXPOSURE DEVICE AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique which correctly suppresses variations in the light quantity distribution of exposure light at a comparatively early stage.SOLUTION: A detection part 51 inspects belt-like light used in drawing on a substrate. This detection part 51 includes: a one-dimensional CCD element 519 which measures the one-dimensional light quantity distribution at least in the short-width direction; and a detection part carrying mechanism by which the one-dimensional CCD element 519 is relatively moved to a spatial light modulator along the longitudinal direction of light.