| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample cross section analysis method capable of easily and simply observing and chemically analyzing a cross section of a sample.SOLUTION: A sample cross section analysis method includes placing a sample having an inclined cross section 3 in an electron scanning microscope, and analyzing the inclined cross section 3. The inclined cross section 3 is created by radiating an ion beam 1 diagonally to a sample surface 2 using a focused ion beam processing device. The analysis is performed after the inclined cross section 3 is adjusted to a predetermined ange in the electron scanning microscope, and therefore the analysis can be performed from a vertical direction relative to the inclined cross section 3. |
