SEMICONDUCTOR MEMORY DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR MEMORY DEVICE, AND PROBE

摘要

PROBLEM TO BE SOLVED: To stabilize the electric conduction between a probe and an electrode.SOLUTION: A semiconductor memory device includes: a lower electrode 102 formed on an insulating film; a memory element layer 103 formed on the lower electrode 102; a plurality of upper electrodes 104 provided in a matrix shape on the memory element layer 103; and a probe 14 performing read and write of data for the memory element layer 103 by being in contact with the upper electrodes 104. Each of the upper electrodes 104 has a metal film 104a formed on the memory element layer 103 and a conductive nano-material layer 104b formed on the metal film 104a.