| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a nitride crystal of group 13 metals in the periodic table, which utilizes a liquid phase growth method, and can manufacture the periodic table group 13 metal nitride more efficiently and stably by establishing a technology capable of executing the process operations and the treatments smoothly and flexibly.SOLUTION: A nitride crystal of group 13 metals in the periodic table can be manufactured more efficiently and stably by measuring in-situ with time elemental species concentrations of dissolved chemical species and/or dissolved chemical species in a liquid phase, and determining the timing of initiating crystal growth and the timing of changing the settings based on the measurement result. |
