| 摘要 |
PROBLEM TO BE SOLVED: To provide a thickness measuring device, a thickness measuring system, and a thickness measuring method, in which brightness unevenness correction is minimized so as to shorten a measurement time.SOLUTION: A thickness measuring device 1 includes an illuminating unit, an imaging unit 3, and an image processing unit 10 for calculating a thickness distribution of a measurement surface out of a picked-up image data. There are further provided: a divided area correction coefficient setting part for setting a correction coefficient with which brightness unevenness of light emitted from the illuminating unit 4 is corrected, for each of divided areas, which is obtained by dividing a measurement surface of a measurement target object into a plurality of areas; and an integrated area correction coefficient setting part for setting a correction coefficient for an integrated area, which is obtained by integrating at least two or more divided areas. The image processing unit 10 calculates the thickness distribution of the measurement surface by using at least the correction coefficient of the integrated area out of the correction coefficient of the divided area and the correction coefficient of the integrated area. |
