| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for creating efficient model-based sub-resolution assist features (MB-SRAF).SOLUTION: An SRAF guidance map (SGM) is created, where each design target edge location votes for a given field point on whether a single-pixel SRAF placed on this field point would improve or degrade an aerial image over a process window. In one embodiment, the SGM is used to determine SRAF placement rules and/or to finely tune already-placed SRAFs. The SGM is used directly to place SRAFs in a mask layout. Mask layout data including SRAFs is generated, wherein the SRAFs are placed according to the SGM. The SGM comprises an image in which each pixel value indicates whether the pixel would contribute positively to edge behavior of features in the mask layout if the pixel is included as part of SRAF. |
