| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring device which can obtain a phase delay distribution image of a measured object from one image, and which includes a simple optical system.SOLUTION: A three-dimensional shape measuring device 1 includes: a coherent light source 10; a random phase modulation optical system 11; an installation base 12; a Fourier transformation optical system 13; an imaging element 14; and an arithmetic section 15. The random phase modulation optical system 11 two-dimensionally and randomly phase-modulates coherent light, and generates planar light two-dimensionally and randomly phase-modulated. The Fourier transformation optical system 13 generates a light intensity distribution image by an optical Fourier transformation of light transmitted through a measured object 16. The imaging element 14 captures the light intensity distribution image. The arithmetic section 15 calculates phase information of the measured object 16 from the captured light intensity distribution image. The arithmetic section 15 calculates a three-dimensional shape of the measured object 16 from the phase information. |
