发明名称 DEVICE FOR RESTRAINING VIBRATION AND METHOD OF RESTRAINING VIBRATION
摘要 PROBLEM TO BE SOLVED: To provide a technique advantageous for restraining vibration transmitted from an outside such as a base block, in a device for restraining the vibration.SOLUTION: This device 100 for restraining vibration includes the first generation part 21 for generating the first signal for indicating a driving amount of a driving part 10, to make small a deviation between a relative distance of a base block 1 to the first object 2 and the first reference distance, the second generation part 22 for generating the second signal for indicating a driving amount of the driving part 10, to make small a deviation between a relative distance of the first object 2 to the second object 4 and the second reference distance, and a control part 23 for controlling the first generation part 21, the second generation part 22 and the driving part 10, the control part 23 operates the first generation part 21, and controls the driving part 10, based on the first signal, and the control part 23 operates the second generation part 22, after the deviation between the relative distance of the base block 1 to the first object 2 and the first reference distance gets within an allowance range, and controls the driving part 10, based on the first signal and the second signal, in the device 100 for restraining the vibration.
申请公布号 JP2013190070(A) 申请公布日期 2013.09.26
申请号 JP20120057875 申请日期 2012.03.14
申请人 CANON INC 发明人 ASANO TOSHIYA
分类号 F16F15/02;F16F15/04;H01L21/027 主分类号 F16F15/02
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