发明名称 METHOD OF FORMING TRANSPARENT CONDUCTIVE FILM AND METHOD OF FORMING TRANSPARENT ELECTRODE
摘要 PROBLEM TO BE SOLVED: To provide a method of forming a transparent conductive film and a method of forming a transparent electrode which are capable of forming a low-resistant transparent conductive film on the surface of a substrate having low heat resistance.SOLUTION: A transparent conductive film 11 comprised of sheet-shaped graphene is formed by coating graphene ink, which is obtained by dispersing graphene into a predetermined solvent, to the surface of a substrate S1, and sintering the coated object at a temperature of 180°C or below. A protective layer 12 comprised of a silicon oxynitride film is formed on the surface of another substrate S2. Rear surfaces of these two substrates S1 and S2 are laminated together.
申请公布号 JP2013191275(A) 申请公布日期 2013.09.26
申请号 JP20120054411 申请日期 2012.03.12
申请人 ULVAC JAPAN LTD 发明人 TAKEI HIDEO;SAKIO SUSUMU;SATO MUNEYUKI;HIRAOKA KENSUKE;IKEDA SATOSHI;SAKAO YOSUKE;OTAKE FUMITO
分类号 H01B13/00;B32B9/00;C01B31/02;C23C16/26;C23C16/509 主分类号 H01B13/00
代理机构 代理人
主权项
地址