SOLUTION SUPPLYING APPARATUS

摘要

PURPOSE: A liquid supplying apparatus is provided to improve the inner space utilization of a fab by setting up minimum configuration for supplying a liquid. CONSTITUTION: A first liquid supplying part (110) includes a first pump. The first liquid supplying part supplies a liquid to a chamber (10). The first pump maintains the supplied liquid under constant pressure. A second liquid supplying part (120) supplies the liquid to the first supplying part. A second supplying part includes a liquid storage tank, a heater, and a second pump. [Reference numerals] (10) Chamber; (110) First liquid supplying part; (120) Second liquid supplying part; (130) Recovery part; (AA) First layer; (BB) Second layer