| 摘要 |
<p>PURPOSE: A liquid flow control for depositing a film is provided to block a positive liquid by forming a flexible diaphragm separated by a gap. CONSTITUTION: An orifice and a liquid pass through a gap (225). A diaphragm (220) is separated by the gap. The diaphragm controls the rate of the liquid flowing through the orifice. The diaphragm blocks the positive liquid of the flowing liquid. The diaphragm has enough flexibility.</p> |
