| 发明名称 |
DEPOSITION CHAMBER CLEANING USING IN SITU ACTIVATION OF MOLECULAR FLUORINE |
| 摘要 |
Methods and apparatus for the cleaning reaction chambers using molecular fluorine as the cleaning material. The molecular fluorine is dissociated in-situ in the reaction chamber using the chamber RF power source.
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| 申请公布号 |
KR20130105308(A) |
申请公布日期 |
2013.09.25 |
| 申请号 |
KR20127033203 |
申请日期 |
2011.08.18 |
| 申请人 |
LINDE AG. |
发明人 |
CIGAL JEAN CHARLES;HWANG YING SIANG;STOCKMAN PAUL ALAN;PETRI STEFAN |
| 分类号 |
B08B3/12;B08B9/08 |
主分类号 |
B08B3/12 |
| 代理机构 |
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代理人 |
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