发明名称 |
Multiple gas injection system |
摘要 |
A multi-positional valve is used to control the destination of gas flows from multiple gas sources. In one valve position the gases flow to an isolated vacuum system where the flow rate and mixture can be adjusted prior to introduction into a sample vacuum chamber. In another valve position the pre-mixed gases flow from the isolated vacuum chamber and through a needle into the sample vacuum chamber. |
申请公布号 |
EP2642506(A1) |
申请公布日期 |
2013.09.25 |
申请号 |
EP20130160075 |
申请日期 |
2013.03.20 |
申请人 |
FEI COMPANY |
发明人 |
RASMUSSEN, JORGEN;MALINAK, KEVIN |
分类号 |
H01J37/02;B05B1/00;B05B1/30;F16K11/00;F16K11/07;H01J37/16;H01J37/30 |
主分类号 |
H01J37/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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