发明名称
摘要 Provided are an apparatus for gas scrubbing and a method for gas scrubbing. The apparatus for gas scrubbing includes: a reaction tube through which a reaction gas is flown in; a reactor which is connected to the reaction tube and activates the reaction gas with plasma; and a water injection port which injects water to the plasma in the reactor. It allows a very economical gas scrubbing because water is vaporized using the plasma as heat source, without using an additional heater. In addition, the efficiency of gas scrubbing is also improved because water is directly vaporized at an optimized region where the reaction gas in plasma state is discharged.
申请公布号 JP5297533(B2) 申请公布日期 2013.09.25
申请号 JP20110533111 申请日期 2009.10.27
申请人 发明人
分类号 B01D53/68;B01D53/46;B01J19/08;H01L21/3065 主分类号 B01D53/68
代理机构 代理人
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