GAS-LIQUID SEPARATOR AND POLISHING APPARATUS

摘要

PURPOSE: A gas-liquid separator and a polishing apparatus are provided to maximally control mist and vapor caused when two phase gas and liquid collides with the bottom surface of a main body. CONSTITUTION: A gas-liquid separator comprises a cylindrical main body (12), a cylindrical gas and liquid inlet pipe (16), and a guide tool (24). A liquid discharge port (12a) connected to a drain pipe (20) is installed on the bottom of the main body. An exhaust port (12b) is installed on the side of the main body above the bottom end of the gas and liquid inlet pipe. The guide tool is arranged inside of the gas and liquid inlet pipe and stirs two phase gas and liquid flowing in the gas and liquid inlet pipe.