| 摘要 |
PURPOSE: A laser processing apparatus generates cleavage and dehiscence down to the deeper position in a subject than the position of the prior art, thereby forming the division starting point. CONSTITUTION: A laser processing apparatus includes a stage unit (10) and an optical system (20). The stage unit fixes a subject. The optical system scans the subject, which is fixed to the stage unit, with pulse laser light from a scanning lens. The optical system includes a branching means that optically separates one pulse laser light into a plurality of separation optical paths. Respective the plurality of optical paths include the scanning lenses in common, and include lenses different from each other that have different composite focal lengths. |
