发明名称 Purge valve in a plasma deposition apparatus
摘要 Device for coating a container (104), preferably a plastic bottle, using plasma treatment, comprises at least one gas lance (103) for supplying process gas into the container, and at least one exhaust valve (100) for evacuating air from the container interior, where the exhaust valve comprises: at least one centrally arranged recess (102) for accommodating or importing at least one gas lance in the container; and at least one grounded electrical- and gas-permeable shield element (101), which completely prevents and/or suppresses an ignition and/or combustion of plasma in the exhaust valve. An independent claim is also included for coating a container, preferably a plastic bottle, using plasma treatment, comprising: introducing a gas lance into the container interior, where the gas lance is guided by a recess in a exhaust valve arranged on the container opening, evacuating the container interior at a process pressure, preferably 1-30 Pa, supplying the process gas into the container through the gas lance, and performing the plasma-assisted coating of the container interior by vapor deposition, where at least one electrical shield element present in the exhaust valve completely prevents and/or suppresses an ignition and/or combustion on the plasma in the exhaust valve or in an area, which is devoid of coating.
申请公布号 EP2641995(A1) 申请公布日期 2013.09.25
申请号 EP20120199757 申请日期 2012.12.28
申请人 KRONES AG 发明人 KRUEGER, JOCHEN;KRAUS, ANDREAS
分类号 C23C16/04;C23C16/52;H01J37/32 主分类号 C23C16/04
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