| 摘要 |
PURPOSE: A method for inspecting a measurement object is provided to compensate a shadow area by using amplitude information, thereby minimizing the noise of the shadow area. CONSTITUTION: A method for inspecting a measurement object is as follows. Shadow areas per each direction of a board by irradiating lights to a plurality of direction on the board where a measurement object is formed(S130). The obtained shadow areas per each direction are merged so that a shadow map is generated(S150). One or more among a size, a position, and rotation information are obtained from the shadow map. [Reference numerals] (AA) Start; (BB) Finish; (S110) Photographing with a camera after irradiating pattern lights to a plurality of directions n-times; (S120) Visibility maps per each direction by using n-images; (S130) Obtaining shadow areas per each direction; (S140) Compensating shadow areas per each direction; (S150) Generating a shadow map by merging shadow areas per each direction |
