| 发明名称 |
Method for manufacturing thin film transistor |
| 摘要 |
A thin film transistor and a method for manufacturing the same are provided. A top-gate thin film transistor is fabricated by a process using two gray-tone photomasks and a lift-off method. Therefore, the method can save cost of photomasks and processes comparing to a conventional fabrication method.
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| 申请公布号 |
US8541268(B2) |
申请公布日期 |
2013.09.24 |
| 申请号 |
US201113315430 |
申请日期 |
2011.12.09 |
| 申请人 |
LIAO CHAN-CHANG;CHIU HSIEN-KUN;YEN WEI-PANG;HSU CHAO-HUAN;CHUNGHWA PICTURE TUBES, LTD. |
发明人 |
LIAO CHAN-CHANG;CHIU HSIEN-KUN;YEN WEI-PANG;HSU CHAO-HUAN |
| 分类号 |
H01L21/00;H01L21/84 |
主分类号 |
H01L21/00 |
| 代理机构 |
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