发明名称 COATING APPARATUS AND METHOD FOR PRODUCING COATED MATTER
摘要 PURPOSE: A coating apparatus and a method for manufacturing a coated element are provided to prevent coating materials which are attached to the leading end of a coating nozzle from being dried by supplying solvents to the leading end of the coating nozzle. CONSTITUTION: A stage (10) loads a coating object (100). A rotating device (11) rotates the stage. A coating nozzle (12) discharges coating materials to the coating object. A supply device (13) supplies the coating materials to the coating nozzle. A discharge device (14) discharges the coating materials. The coating materials flow in a connection path (15). A pressure detecting unit (16) detects the pressure of the connection path.
申请公布号 KR20130103401(A) 申请公布日期 2013.09.23
申请号 KR20130024408 申请日期 2013.03.07
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SATO TSUYOSHI;OOSHIRO KENICHI
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
主权项
地址