LARGEST SPACE GLASS ALIGNER OF DRIVING APPARATUS

摘要

PURPOSE: A driving apparatus of a large-sized glass is provided to maximize the accuracy of alignment by accurately controlling a mask in a process for aligning a glass and the mask through a CC camera. CONSTITUTION: A CCD camera (310) obtains the align information of a mask holder. A supporting part (105) includes a UVW driving part. The UVW driving part resets the align of a load part, a glass, and the CCD camera. A position correction member (107) supports the lower part of a main shaft. The position correction member performs a position correction process on the clockwise and counterclockwise rotation of the main shaft.