发明名称 POSITION MANIPULATOR FOR AN OPTICAL COMPONENT
摘要 A device for adjustably positioning an optical component includes a holding unit, which is which at least partly composed of a magnetostrictive material, and a mechanism for generating a magnetic field having a predetermined directional and amplitude distribution in the region of the holding unit. The holding unit has, in a predefined direction, an expansion which can be varied by a specific absolute value by the effect of the magnetic field.
申请公布号 US2013242282(A1) 申请公布日期 2013.09.19
申请号 US201313764573 申请日期 2013.02.11
申请人 HEMBACHER STEFAN;CARL ZEISS SMT GMBH 发明人 HEMBACHER STEFAN
分类号 G02B5/08 主分类号 G02B5/08
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