CHARGED-PARTICLE-BEAM DEVICE, SPECIMEN-OBSERVATION SYSTEM, AND OPERATION PROGRAM

摘要

The present invention makes it possible to improve the skill of a novice user of a charged-particle-beam device, and is characterized by having: an image display device for displaying an operation screen (200) on which operation items for an electron microscope are displayed; a storage device for storing information pertaining to assist buttons (B122) displaying information pertaining to the state of an image (C51) obtained from the detector of the electron microscope, and storing the information according to the image quality of the image (C51), and according to observation conditions which are a combination of the parameter-setting values of the electron microscope; and an operation program for analyzing the image quality of the image obtained from the detector, obtaining the assist buttons (B122) from the storage device on the basis of the current observation conditions and the image quality of the image as the result of the analysis, and displaying the obtained assist buttons (B122) in a prescribed location of the operation screen (200).