| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow meter which can improve resolution in a low flow rate region to make resolution uniform within the range of measurable flow rates.SOLUTION: The flow meter comprises: a flow target 14 arranged to be located in a fluid flow path in a conduit 12; a beam 16 coupled to the flow target 14 and arranged to extend outside of the conduit 12; and a sensor 20 having a moveable sensor part coupled to the beam 16 at a position outside of the conduit 12, and an electrostatic sensor part 64. Displacement of the moveable sensor part generated by a fluid flow acting on the flow target 14 is detected by the electrostatic sensor part 64, to generate a flow rate signal. |
