| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser oscillator which cools a discharge electrode and sufficiently secures the reliability in terms of insulation quality.SOLUTION: Ceramic electrodes are disposed so as to face each other across a discharge space. Conductive electrodes are respectively disposed on surfaces of the ceramic electrodes which are opposite to the surfaces facing each other. An insulative ceramic cooling member is thermally coupled to an outer surface of each conductive electrode. A passage for a cooling medium is formed in the cooling member. A housing houses the ceramic electrodes and a laser gas fills the housing. |
