发明名称 |
AUTOMATIC PARTICLE MEASUREMENT CART AND AUTOMATIC PARTICLE MEASUREMENT SYSTEM FOR CLEAN ROOM AND MEASUREMENT METHOD THEREOF |
摘要 |
The present invention discloses an automatic particle measurement cart and an automatic particle measurement system for clean room and a measurement method thereof. The automatic measurement cart includes an automatic piloting device, which guides the cart to move along a pre-set path. The automatic piloting device includes a reading head, which recognizes the pres-set detective path and detects multiple pre-set measurement points. The cart moves along the detective path. A measurement device measures particles at the measurement points. A data processing device receives particle data measured by the measurement device and provides output according to a pre-set rule. With the above manner, the present invention can automatically measure clean room particles at a given site so as to reduce human labor involved and improve the preciseness of measurement result. |
申请公布号 |
US2013246004(A1) |
申请公布日期 |
2013.09.19 |
申请号 |
US201213510388 |
申请日期 |
2012.04.06 |
申请人 |
QI MINGHU;WU CHUN HAO;LIN KUN HSIEN;WANG YONGQIANG;ZHU ERQING;LI XIANDE;SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO. LTD. |
发明人 |
QI MINGHU;WU CHUN HAO;LIN KUN HSIEN;WANG YONGQIANG;ZHU ERQING;LI XIANDE |
分类号 |
G06F15/00 |
主分类号 |
G06F15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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