| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump capable of easily detecting a rotation direction of a rotor.SOLUTION: In a vacuum pump, a whirling calculation part 425A calculates a whirling amount G in a forward rotation direction on the basis of respective detection values of a radial displacement sensor and a rotation sensor 33 and a whirling calculation part 425B calculates a whirling amount Gr in a reverse rotation direction on the basis of respective detection values of the radial displacement sensor and the rotation sensor 33. Therein, a main control part 40 determines the rotation direction of the rotor 30 on the basis of the whirling amounts G, Gr, that is, by comparing magnitudes of the whirling amounts G, Gr and thresholds A, B. |
