| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology that is advantageous for measuring a whole of a wavefront of light passing through a measured optical system.SOLUTION: The measurement method measuring the wavefront of the light passing through the measured optical system comprises: a first step of recovering first wavefront data indicative of a wavefront in a rectangle-shaped second area out of the whole of the wavefront on the basis of difference wavefront partial data in a rectangle-shaped first area of difference wavefront data indicative of a whole of a difference wavefront between the wavefront of the light passing through the measured optical system and a shear wavefront of the wavefront shifted by a predetermined shear amount in a predetermined shear direction; and a second step of recovering wavefront data indicative of the whole of the wavefront on the basis of the difference wavefront data and the first wavefront data. In the second step, second wavefront data indicative of a wavefront in a third area excluding the second area out of the whole of the wavefront is calculated by composing difference wavefront data with respect to wavefront data in a fourth area corresponding to the third area out of the difference wavefront data with wavefront data in the fourth area out of the first wavefront data. |
