| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device and a nozzle recognition method capable of easily changing a coating width of a nozzle part without deteriorating coating accuracy, and capable of suppressing incorrect change of a coating condition even when the coating width is changed.SOLUTION: A coating device includes a stage, and a nozzle part having a slit nozzle, and forms a coating film on a substrate by relatively moving the nozzle part and the stage. Plural types of nozzle parts having different length of the slit nozzle can be replaced, a cutout part cut on a nozzle body side rather than a discharge port position is formed on a longitudinal end of the slit nozzle, and a gap sensor for measuring a distance between the slit nozzle and the stage is attached to the stage, and the type of the nozzle part is discriminated by measuring the position of the cutout part by the gap sensor. |
