| 摘要 |
Apparatus related to measuring angular velocities in three-space are provided. Drive masses distributed in a plane are force-oscillated in two orthogonal directions such that gyration of the collective is performed. Sense masses coupled by flexures to the drive masses are each displaceable along a respective single degree of freedom in response to angular velocities about a vector orthogonal to that degree of freedom. Electronic circuitry measures the respective sense mass displacements and provides corresponding signaling. The drive masses and sense masses can be formed such that a microelectromechanical system (MEMS) device is defined. |
