发明名称
摘要 The invention relates to a gas phase method for producing nanometric particles in a reactor for producing particles in a gas phase, in which there is an interaction between a reaction flow and an energy flow. This method comprises the following steps: a step for coupling a device for producing gaseous chlorides with this reactor, a step for producing gaseous chlorides from a base precursor in the form of powders, and a step for injecting such a reaction flow into the reactor.
申请公布号 JP5290161(B2) 申请公布日期 2013.09.18
申请号 JP20090512566 申请日期 2007.05.29
申请人 发明人
分类号 B82B3/00;B01J19/12;B82Y40/00;C01B31/30 主分类号 B82B3/00
代理机构 代理人
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