| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device and a measurement method that attain effects similar to those of an improved inversion method by use in a still state for fully making the most of characteristics of a level and an autocollimator for shifting a standard square in a scanning direction in place of inversion, and that are not affected by the asymmetry of the drifting characteristics of a sensor as seen in a three-point method, by composing a measurement system having at most two sensors, or a single sensor, if few. SOLUTION: For measuring the shape of a surface to be measured for each interval D to obtaining the difference, an auxiliary reference for comparison is shifted in a measurement scanning direction by the interval D, before further measurements, thus the influence of deformation of the auxiliary reference is minimized, before and after the shift. In a method using the shift, an attitude change in the auxiliary reference before and after the shift becomes a parabolic error of the measurement shape. However, by a means of measuring the parabola error using an inclination sensor, such as a level and an autocorrelator for correction, parabolic errors can be effectively excluded from measurement results. COPYRIGHT: (C)2011,JPO&INPIT
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