| 摘要 |
Disclosed is a conductive diamond-like carbon protective film having both high hardness and high wear resistance, which is produced by a specific film-forming method. Also disclosed is a method for producing such a conductive diamond-like carbon protective film. Specifically disclosed is a method for producing a conductive protective film for protecting a substrate, wherein a conductive diamond-like carbon protective film containing a predetermined amount of boron is formed on the substrate by using a mixed gas containing a hydrocarbon raw material gas and a boron doping gas at a predetermined ratio. It is preferable that one or more members selected from the group consisting of trimethyl borate, trimethyl boron and triethyl boron are used as the boron doping gas.
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