| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a multilayer ceramic substrate, excellent in mass-productivity with respect to the deformation of the cavity in the multilayer ceramic substrate having a cavity: an electronic component using the same: and a method for manufacturing the multilayer ceramic substrate. <P>SOLUTION: In the multilayer ceramic substrate having a cavity in which a plurality of ceramic layers are laminated, the cavity has a conductor layer on its bottom and a recess region having a step difference of the ceramic layer which is formed so as to overlap the outer edge of the conductor layer or inside the outer edge below the surface of the conductor layer, and the recess region is shallower in the center than in the outer edge. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
