发明名称 |
Mask blank manufacturing method, transfer mask manufacturing method, mask blank, and transfer mask |
摘要 |
Provided is a method of manufacturing a mask blank having a thin film on a transparent substrate. The method includes forming the thin film made of a material containing a transition metal on the transparent substrate and applying a superheated steam treatment to the thin film. |
申请公布号 |
US8535855(B2) |
申请公布日期 |
2013.09.17 |
申请号 |
US201113109132 |
申请日期 |
2011.05.17 |
申请人 |
SAKAI KAZUYA;HASHIMOTO MASAHIRO;HOYA CORPORATION |
发明人 |
SAKAI KAZUYA;HASHIMOTO MASAHIRO |
分类号 |
G03F1/68;B08B7/02;G03F1/32;G03F1/58;G03F1/82 |
主分类号 |
G03F1/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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