发明名称 STAGGERED THIN FILM TRANSISTOR AND METHOD OF FORMING THE SAME
摘要 <p>A staggered thin film transistor and a method of forming the staggered thin film transistor are provided. The thin film transistor includes an annealed layer stack including an oxide containing layer, a copper alloy layer deposited on the conductive oxide layer, a copper containing oxide layer, and a copper containing layer.</p>
申请公布号 KR20130102576(A) 申请公布日期 2013.09.17
申请号 KR20137008425 申请日期 2011.08.09
申请人 APPLIED MATERIALS, INC. 发明人 PIERALISI FABIO
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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