HIGH FREQUENCY HEATING APPARATUS

摘要

PURPOSE: A high frequency heating device is provided to prevent a selective heating of a substrate by suppressing the interference between high frequencies which are generated from each high frequency generator with reflecting the high frequency with a reflection part. CONSTITUTION: A high frequency heating device comprises a high-frequency generator (200) which high frequency-heats a substrate (100). An interval between the high-frequency generator and the substrate is represented as following formula: n/2 *λ(n=1-6, andλis a wavelength of the high frequency). The high frequency heating device is equipped with multiple high-frequency generators. Multiple high-frequency generators (210,220,230) are respectively arranged with an interval which is represented as following formula: n/2 *λ(n=1-12). The high frequency heating device further includes a reflection part (300). The reflection part reflects the high frequency which is generated in the high-frequency generator to the substrate. The reflection part comprises a first reflection part, a second reflection part, and a third reflection part. The first reflection part divides between high-frequency generators which are separated from each other. The second reflection part is installed in the left side or/and the right side of the high-frequency generator. The third reflection part is installed in the upper part or/and the lower part. [Reference numerals] (AA) Returning direction