| 摘要 |
DEVICE AND METHOD FOR OPTICAL IMAGE CORRECTION IN METROLOGY An optical metrology and image correction device (1 10) includes a point size light source (116) adapted to emit a beam of light and a translucent mask (118) that receive the beam of light. The translucent mask (118) rotates from a first position wherein the beam of light is received by the translucent mask (118) in a direction substantially orthogonal to the translucent mask (118) to a second position wherein the beam of light is received by the translucent mask (118) at an angle offset with respect to the translucent mask (118). A corresponding method of measuring and correcting an image from an optical metrology and image correction device (110) includes emitting a beam of light from a point size light source (116), causing the beam of light to be received by a translucent mask (118) in a first position substantially orthogonal to the mask (118) and in a second position in a direction offset with respect to the translucent mask (118). 7V1)A7n7 1-Y C -D C=i) T- CIO |
