发明名称 LASER DEVICE, AND EXPOSURE DEVICE AND INSPECTION DEVICE PROVIDED WITH LASER DEVICE
摘要 The laser device of the present invention is provided with a laser light output unit for outputting a fundamental laser light, a wavelength conversion unit for converting the wavelength of the fundamental laser light and outputting a converted laser light, a power feedback circuit for controlling the power of the fundamental laser light so that the power of the converted laser light is constant, a phase matching adjustment structure for changing a state variable relating to phase matching in a wavelength converting optical element, and a phase matching control circuit for controlling the operation of the phase matching adjustment structure. The phase matching control circuit is configured so that the state variable is changed within a predetermined range by the phase matching adjustment structure, and the state variable is adjusted to a state variable whereby the power of the fundamental laser light outputted from the laser light output unit is minimized in a state in which the power of the converted laser light is controlled by the power feedback circuit so as to be constant.
申请公布号 WO2013133278(A1) 申请公布日期 2013.09.12
申请号 WO2013JP56010 申请日期 2013.03.05
申请人 NIKON CORPORATION 发明人 TAKADA, YASUTOSHI
分类号 G02F1/37;H01S3/10 主分类号 G02F1/37
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