发明名称 SHAPE-MEASUREMENT DEVICE, SYSTEM FOR MANUFACTURING STRUCTURAL OBJECT, SCANNING DEVICE, METHOD FOR MEASURING SHAPE, METHOD FOR MANUFACTURING STRUCTURAL OBJECT, AND SHAPE-MEASUREMENT PROGRAM
摘要 <p>In the present invention, measurements are performed with more uniform precision than achieved in the past across the entirety of a measurement region upon which a lattice pattern is projected. A shape-measurement device is provided with a light-generating unit for generating light, a projection unit for varying the radiation direction of light generated by the light-generating unit to scan light on the measurement object, a control unit for cyclically varying the intensity of light generated by the light-generating unit and controlling the light-generating unit so that the amplitude of the variation in intensity of the generated light is caused to vary according to the radiation direction, an image-capturing unit for capturing an image of the measurement object, and a measurement unit for calculating the three-dimensional shape of the measurement object on the basis of the image of the measurement object obtained by the image-capturing unit.</p>
申请公布号 WO2013133286(A1) 申请公布日期 2013.09.12
申请号 WO2013JP56029 申请日期 2013.03.05
申请人 NIKON CORPORATION 发明人 TAKAHASHI, AKIRA
分类号 G01B11/25 主分类号 G01B11/25
代理机构 代理人
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