| 摘要 |
<p>An image processing device (1) has the following: a means that partitions a taken image into a plurality of scan regions, and for each scan region, determines a scan direction therefor on the basis of a pattern edge in that scan region of the taken image; a means that, for each scan region, determines a scan order in which to perform raster scanning on the pixels constituting said scan region such that the horizontal direction of said raster scanning is the scan direction determined for said scan region; and a means that, for each scan region, acquires a scan image by using a scanning electron microscope to image said scan region according to the determined scan order.</p> |
