发明名称 SPUTTERING TARGET FOR MAGNETIC RECORDING MEDIUM, AND PROCESS FOR PRODUCING SAME
摘要 A sputtering target for magnetic recording media, characterized in that the B-rich phase has an average grain area of 90 µm2 or less; and a process for producing a sputtering target for magnetic recording media, the process being characterized by heat-treating an alloy ingot, subsequently subjecting the heat-treated ingot to primary rolling which includes at least one cold-rolling pass, thereafter subjecting the rolled alloy to secondary rolling, and machining the rolled alloy into a target. The sputtering target for magnetic recording media has few cracks in the B-rich phase and has a high leakage flux density. With this target, discharge during sputtering is stabilized and the arcing which occurs from cracks of the B-rich phase is inhibited. Thus, the problem of inhibiting the generation of particles is eliminated.
申请公布号 WO2013133163(A1) 申请公布日期 2013.09.12
申请号 WO2013JP55672 申请日期 2013.03.01
申请人 JX NIPPON MINING & METALS CORPORATION 发明人 OGINO SHIN-ICHI;NAKAMURA YUICHIRO
分类号 G11B5/851;B21B3/00;C22C19/07;C22F1/00;C22F1/10;C23C14/34 主分类号 G11B5/851
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