| 摘要 |
A method of preparing an organic light-emitting device including: forming an organic emission unit (13) on a substrate (11); and forming a thin film encapsulation layer (20) including at least one inorganic layer including a low temperature viscosity transition (LVT) inorganic material, the forming the thin film encapsulation layer including forming the at least one inorganic layer, and the forming the at least one inorganic layer including: forming a pre-inorganic layer (23) including the LVT inorganic material on the organic emission unit (13) by heating a source including the LVT inorganic material using plasma in a vacuum and depositing the LVT inorganic material or ions of the LVT inorganic material separated from the source on the organic emission unit (13); and applying a healing process to the pre-inorganic layer (23) at a temperature greater than a viscosity transition temperature of the LVT inorganic material and an organic light-emitting device prepared by this method. |
