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发明名称
摘要
申请公布号
JP5286873(B2)
申请公布日期
2013.09.11
申请号
JP20080083152
申请日期
2008.03.27
申请人
发明人
分类号
H05B33/12;G09F9/00;G09F9/30;H01L27/32;H01L51/50;H05B33/10;H05B33/22
主分类号
H05B33/12
代理机构
代理人
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地址
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