Sensor module, force detecting device, and robot

摘要

A sensor module (10) includes a first member (12) including a first recess (30) in which a sensor element (42) including a piezoelectric element and an electrode is arranged, a second member (34) joined to the first member (12), a first plate (70) in contact with the second member (34), a second plate (80) in contact with the first member (12), and a fastening section (86) configured to fasten the first plate (70) and the second plate (80). A first projection (72) projecting toward the second member (34) is provided on the first plate (70). The internal height of the first recess (30) of the first member (12) is larger than the height of the sensor element (42). The sensor element (42) is in contact with the second member (34).