SUBSTRATE HOLDING UNIT FOR ROLL TO ROLL DEPOSITION SYSTEM FOR MANUFACTURING THIN FILM DEVICE ON FLEXIBLE SUBSTRATE

摘要

PURPOSE: A substrate holding unit for a roll to roll deposition system for manufacturing a thin film device on a flexible substrate is provided to prevent a shadow effect by improving contact between a roll mask and a flexible substrate. CONSTITUTION: A flexible substrate (10) is connected to a winding roll. A roll mask (30) forms a pattern. A rotation-type substrate holder (90) is formed. A magnet roller includes a magnet. The substrate holder and the roll mask are in contact with the flexible substrate.