发明名称 Semiconductor device and manufacturing method of the same
摘要 Provided is a semiconductor device. The semiconductor device includes a first insulation layer on a semiconductor substrate, the first insulation layer including a lower metal line, a metal head pattern on the first insulation layer, the metal head pattern including an inclined side surface, a thin film resistor pattern on the metal head pattern, a second insulation layer on the metal head pattern and the thin film resistor pattern, an upper metal line on the second insulation layer, a first via connecting the lower metal line to the upper metal line, and a second via connecting the metal head pattern to the upper metal line.
申请公布号 US8531003(B2) 申请公布日期 2013.09.10
申请号 US201213471183 申请日期 2012.05.14
申请人 LEE CHANG EUN;DONGBU HITEK CO., LTD. 发明人 LEE CHANG EUN
分类号 H01L29/00 主分类号 H01L29/00
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