发明名称 |
MECHANICAL LAYER OF AN ELECTROMECHANICAL DEVICE AND METHODS OF FORMING THE SAME |
摘要 |
This disclosure provides mechanical layers and methods of forming the same. In one aspect, an electromechanical systems device includes a substrate and a mechanical layer having an actuated position and a relaxed position. The mechanical layer is spaced from the substrate to define a collapsible gap. The gap is in a collapsed condition when the mechanical layer is in the actuated position and in a non-collapsed condition when the mechanical layer is in the relaxed position. The mechanical layer includes a reflective layer, a conductive layer, and a supporting layer. The supporting layer is positioned between the reflective layer and the conductive layer and is configured to support the mechanical layer. |
申请公布号 |
KR20130100232(A) |
申请公布日期 |
2013.09.10 |
申请号 |
KR20127029146 |
申请日期 |
2011.04.01 |
申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
TAO YI;ZHONG FAN;DE GROOT WILHELMUS A. |
分类号 |
G02B26/00;B81B3/00 |
主分类号 |
G02B26/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|