SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a scanning electron microscope in which resolution improvement is made compatible with pattern identification capability improvement.SOLUTION: In a scanning electron microscope comprising a monochromator which makes an electron beam monochromatic, the monochromator includes a magnetic field generator which deflects the electron beam and a selectively energy diaphragm which passes a part of the electron beam deflected by the magnetic field generator. On a trajectory where electrons discharged from a sample are deflected by a magnetic field generated by the magnetic field generator, there are arranged a stop which passes a part of electrons discharged from the sample and a detector which detects the electrons passing through the diaphragm.