DEFECT DETECTION METHOD, DEFECT DETECTION DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a defect detection method capable of detecting defects even when the amount of current that is required to detect the defects of a semiconductor substrate is restricted.SOLUTION: A defect detection method includes the steps of: obtaining an infrared image that indicates the temperature distribution of a semiconductor substrate in which voltage is being applied to a plurality of wirings; locating a heated semiconductor element; and determining a wiring being electrically connected with the heated semiconductor element out of the plurality of wirings as a defective wiring having a short circuit defect, on the basis of information on an electrical connection relation between pre-identified locations of the plurality of semiconductor elements, and the plurality of wirings.